The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2019

Filed:

May. 25, 2017
Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Julian Kaller, Koenigsbronn, DE;

Franz Sorg, Aalen, DE;

Ralf Winter, Schwaebisch Gmuend, DE;

Karl-Stefan Weissenrieder, Elchingen, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 7/02 (2006.01); G02B 7/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70958 (2013.01); G02B 7/028 (2013.01); G02B 7/181 (2013.01); G02B 7/1815 (2013.01); G03F 7/70341 (2013.01); G03F 7/70891 (2013.01);
Abstract

An optical assembly includes: an optical element, which is transmissive or reflective to radiation at a used wavelength and has an optically used region; and a thermally conductive component, which is arranged outside the optically used region of the optical element. The thermally conductive component can include a material having a thermal conductivity of more than 500 W mK. Additionally or alternatively, the product of the thickness of the thermally conductive component in millimeters and the thermal conductivity of the material of the thermally conductive component is at least 1 W mm mK.


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