The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Nov. 23, 2016
Asml Netherlands B.v., Veldhoven, NL;
Stoyan Nihtianov, Eindhoven, NL;
Ruud Hendrikus Martinus Johannes Bloks, Helmond, NL;
Johannes Paul Marie De La Rosette, Venlo, NL;
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Kofi Afolabi Anthony Makinwa, Delft, NL;
Patricius Jacobus Neefs, Raamsdonksveer, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Leende, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A measurement substrate for measuring a condition pertaining in an apparatus for processing production substrates during operation thereof, the measurement substrate including: a body having dimensions compatible with the apparatus; a plurality of sensor modules embedded in the body, each sensor module having: a sensor configured generate an analog measurement signal, an analog to digital converter to generate digital measurement information from the analog measurement signal, and a module controller configured to output the digital measurement information; and a central control module configured to receive the digital measurement information from each of the module controllers and to communicate the digital measurement information to an external device.