The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Aug. 29, 2017
Applicant:
Nuflare Technology, Inc., Kanagawa, JP;
Inventors:
Takumi Yamada, Yokohama, JP;
Takashi Haraguchi, Fujisawa, JP;
Assignee:
NuFlare Technology, Inc., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/12 (2006.01); C30B 25/10 (2006.01); C30B 25/16 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C30B 25/12 (2013.01); C30B 25/10 (2013.01); C30B 25/165 (2013.01); H01L 21/68714 (2013.01);
Abstract
A vapor phase growth apparatus according to an embodiment includes a reaction chamber, a ring-shaped holder provided in the reaction chamber, the ring-shaped holder configured to hold a substrate, the ring-shaped holder including an outer portion, and an inner portion on which a ring-shaped protrusion is provided and surrounded by the outer portion, the ring-shaped protrusion being separated from the outer portion, an upper surface of the outer portion being higher than an upper surface of the ring-shaped protrusion, and a heater provided below the ring-shaped holder.