Film formation apparatus, film formation method, and manufacturing method of solar battery

Abstract

The present invention provides a technique for performing film formation at low cost without causing a short-circuit between sputtered films formed on opposite surfaces of a film-formation target substrate. According to the present invention, in a substrate-holder conveyance mechanism, a substrate holderis conveyed by a first conveyance portion so that the substrate holderpasses through a first film formation region; film formation is performed by sputtering on a first surface of a film-formation target substrateheld by the substrate holder; the substrate holderis conveyed from the first conveyance portion to a second conveyance portion in such a manner as to make a turn with the up/down orientation of the substrate holdermaintained; the substrate holderis conveyed by the second conveyance portion in a direction opposite to the direction of conveyance by the first conveyance portion so that the substrate holderpasses through a second film formation region; and film formation is performed by sputtering on a second surface of the film-formation target substrate. The substrate holderhas openingsandthrough which first and second surfaces of the film-formation target substrateare exposed, and includes a shield portionfor shielding an edge portion of the film-formation target substratefrom a film formation material supplied from a second sputtering source.