The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Jul. 15, 2019
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Shih-Wei Wang, Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A method includes forming gate spacers and a first interlayer dielectric (ILD) layer over a fin structure, forming a metal gate structure between the gate spacers, selectively growing a metal cap on the metal gate structure, depositing a second ILD layer over the metal cap and the first ILD layer, performing a first chemical mechanical polish (CMP) process on the second ILD layer until the metal cap is exposed, replacing the metal cap with a dielectric cap, after replacing the metal cap with the dielectric cap, etching the second and first ILD layers until source/drain regions of the fin structure are exposed, and forming source/drain contacts respectively on the source/drain regions.