The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2019

Filed:

Feb. 06, 2018
Applicant:

Semiconductor Technologies and Instruments Pte. Ltd., Singapore, SG;

Inventor:

Ajharali Amanullah, Singapore, SG;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G06T 7/00 (2017.01); G01N 21/956 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67288 (2013.01); G01N 21/95684 (2013.01); G06T 7/0004 (2013.01); H01L 22/12 (2013.01); G06T 2200/04 (2013.01); G06T 2207/30148 (2013.01);
Abstract

A 3D object inspection process includes: capturing an object bottom surface 3D profile (a) while an object top surface freely rests on an object seating surface, or (b) without forcibly compressing the top surface of the object against a reference structure distinct from a suction tip; capturing an object top surface 3D profile while (c) the object bottom surface freely rests on the object seating surface, or (d) without forcibly compressing the bottom surface of the object against the reference structure; capturing a plurality of object sidewall images; generating a 3D composite image comprising a 3D digital reconstruction or estimation of the object based upon or using a bottom surface 3D profile image dataset, a top surface 3D profile image dataset, and the sidewall image dataset; and determining a set or array of total object and/or object main body contour values and/or thickness values from the 3D composite image.


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