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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10504726 B1

PDFFull Text
Date of Patent:
Dec. 10, 2019

Filed:

Jun. 16, 2017

Nano-scale structures

Applicant:

SK Hynix Inc., Icheon, KR;

Inventors:

Keun Do Ban, Yongin, KR;

Jung Gun Heo, Icheon, KR;

Cheol Kyu Bok, Pohang, KR;

Myoung Soo Kim, Seongnam, KR;

Assignee:

SK HYNIX INC., Icheon, KR;

Attorney:
Primary Examiner:

Frank J Vineis

Assistant Examiner:

Michael Zhang

Int. Cl.
CPC ...
H01L 21/027 (2006.01); H01L 27/108 (2006.01); H01L 49/02 (2006.01); H01L 21/308 (2006.01); H01L 45/00 (2006.01); H01L 27/24 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0271 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01); H01L 21/3088 (2013.01); H01L 27/10817 (2013.01); H01L 27/10855 (2013.01); H01L 28/92 (2013.01); H01L 27/2463 (2013.01); H01L 45/16 (2013.01); Y10T 428/24669 (2015.01); Y10T 428/24802 (2015.01); Y10T 428/24851 (2015.01);
Abstract

A nanoscale structure includes an array of pillars over an underlying layer, a separation wall layer including first separation walls formed over sidewalls of the pillars, and a block co-polymer (BCP) layer formed over the separation wall layer and filling gaps between the pillars. The BCP layer is phase-separated to include first domains that provide second separation walls formed over the first separation walls and second domains that are separated from each other by the first domains.

Find Patent Forward Citations

Ban, Keun. (2019). Nano-scale structures (U.S. Patent No. 10504726). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10504726

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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