The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2019

Filed:

Aug. 01, 2018
Applicant:

Applied Materials Israel Ltd., Rehovot, IL;

Inventor:

Zeev Zohar, Migdal, IL;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G06K 9/62 (2006.01); G06K 9/46 (2006.01); G06K 9/00 (2006.01); G06N 20/00 (2019.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G06K 9/0014 (2013.01); G06K 9/46 (2013.01); G06K 9/6255 (2013.01); G06N 20/00 (2019.01); G06K 2009/4695 (2013.01); H01J 2237/221 (2013.01); H01J 2237/226 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/28 (2013.01); H01J 2237/2802 (2013.01);
Abstract

A method for generating a synthetic image of a region of an object, includes: generating, by a charged particle microscope, a charged particle microscope image of the region of the object; calculating a sparse representation of the charged particle microscope image; wherein the sparse representation of the charged particle microscope image comprises multiple first atoms; generating the synthetic image of the region, wherein the synthetic image of the region is formed from multiple second atoms; wherein the generating of the synthetic image of the region is based on a mapping between the multiple first atoms and the multiple second atoms; wherein the charged particle microscope image and the multiple first atoms are of a first resolution; and wherein the synthetic image of the region and the multiple second atoms are of a second resolution that is finer than the first resolution.


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