The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2019

Filed:

Apr. 19, 2017
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventor:

Luyang Han, Heidenheim, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G06T 7/33 (2017.01); G06T 3/40 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G06T 3/4038 (2013.01); G06T 7/33 (2017.01); G06T 2207/10061 (2013.01); H01J 2237/226 (2013.01);
Abstract

The system described herein relates to a method for generating a composite image of an object using, for example, a particle beam device such as an electron beam device and/or an ion beam device. A composite image is generated by relatively arranging a first sub image to a second sub image such that the first sub image overlaps the second sub image in the entire common region, a calculated first image position of a first marking in the first sub image is arranged on the first image position of the first marking in the second sub image, and a calculated second image position of a second marking in the first sub image is arranged on the second image position of the second marking in the second sub image.


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