The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2019

Filed:

Jun. 13, 2018
Applicant:

Jeol Ltd., Tokyo, JP;

Inventors:

Kazuki Yagi, Tokyo, JP;

Takeo Sasaki, Tokyo, JP;

Ichiro Onishi, Tokyo, JP;

Shuichi Yuasa, Tokyo, JP;

Masashi Shimizu, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/10 (2006.01); H01J 37/244 (2006.01); H01J 37/09 (2006.01); H01J 37/28 (2006.01); H01J 37/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/09 (2013.01); H01J 37/10 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 37/30 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2809 (2013.01); H01J 2237/31749 (2013.01);
Abstract

A sample holder capable of limiting X-rays accepted into an X-ray detector is provided. The sample holder is for use in an electron microscope equipped with a polepiece assembly and a semiconductor detector. The sample holder includes: a sample stage on which a sample is held; and a shield plate. When the sample stage has been introduced in the sample chamber of the electron microscope, the shield plate is located between the polepiece assembly and the semiconductor detector.


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