The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Dec. 07, 2016
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Hans Butler, Best, NL;
Cornelius Adrianus Lambertus De Hoon, Eindhoven, NL;
Fransiscus Mathijs Jacobs, Asten, NL;
Pavel Kagan, Eindhoven, NL;
Jeroen Pieter Starreveld, Eindhoven, NL;
Maurice Willem Jozef Etiënne Wijckmans, Eindhoven, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/709 (2013.01); G03F 7/70833 (2013.01); G03F 7/70866 (2013.01);
Abstract
A lithographic apparatus is described, the lithographic apparatus comprising: