The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2019

Filed:

Oct. 07, 2015
Applicants:

Samyoung Pure Chemicals Co., Ltd., Chungcheongnam-do, KR;

Mitsubishi Gas Chemical Company, Inc., Tokyo, JP;

Samsung Display Co., Ltd., Gyeonggi-do, KR;

Inventors:

Jung-Ig Jeon, Chungcheongnam-do, KR;

Chi-Sung Ihn, Chungcheongnam-do, KR;

Mi-Soon Lee, Chungcheongnam-do, KR;

Hyun-Eok Shin, Gyeonggi-do, KR;

Joon-Woo Bae, Gyeonggi-do, KR;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); C23F 1/18 (2006.01); C23F 1/30 (2006.01); H01L 21/3213 (2006.01); H01L 27/12 (2006.01); C23F 1/26 (2006.01);
U.S. Cl.
CPC ...
C23F 1/18 (2013.01); C23F 1/26 (2013.01); C23F 1/30 (2013.01); H01L 21/32134 (2013.01); H01L 27/1259 (2013.01); H01L 27/124 (2013.01);
Abstract

Embodiments provide an etchant composition including (A) a copper ion source, (B) a source of an organic acid ion having one or more carboxyl groups in a molecule, (C) a fluoride ion source, (D) an etching controller, a surface oxidizing power enhancer or a combination thereof as a first additive, and (E) a surfactant as a second additive; a method for etching a multilayered film; and a method for preparing a display device.


Find Patent Forward Citations

Loading…