The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Jun. 21, 2016
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Mehran Kianinia, Ashfield, AU;
Olga Shimoni, Wahroonga, AU;
Igor Aharonovich, Waterloo, AU;
Charlene Lobo, Redfern, AU;
Milos Toth, Redfern, AU;
Steven Randolph, Portland, OR (US);
Clive D. Chandler, Portland, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/48 (2006.01); C23C 16/56 (2006.01); H01J 37/317 (2006.01); B82Y 40/00 (2011.01); G01N 33/543 (2006.01);
U.S. Cl.
CPC ...
C23C 16/487 (2013.01); C23C 16/56 (2013.01); H01J 37/317 (2013.01); B82Y 40/00 (2013.01); G01N 33/54353 (2013.01); H01J 2237/31732 (2013.01);
Abstract
Beam-induced deposition decomposes a precursor at precise positions on a surface. The surface is processed to provide linker groups on the surface of the deposit, and the sample is processed to attach nano-objects to the linker groups. The nano-objects are used in a variety of application. When a charged particle beam is used to decompose the precursor, the charged particle beam can be used to form an image of the surface with the nano-objects attached.