The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2019

Filed:

May. 10, 2016
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Frank Fournel, Villard-Bonnot, FR;

Christophe Morales, St Pierre de Mesage, FR;

Hubert Moriceau, Saint-Egreve, FR;

Francois Rieutord, Saint-Egreve, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/02 (2006.01); H01L 23/00 (2006.01); H01L 21/20 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76251 (2013.01); H01L 21/02021 (2013.01); H01L 21/2007 (2013.01); H01L 24/71 (2013.01); H01L 24/83 (2013.01); H01L 24/90 (2013.01); H01L 27/1203 (2013.01); H01L 2224/80894 (2013.01); H01L 2224/80896 (2013.01);
Abstract

A method for direct bonding between at least a first and a second substrate, each of the first and second substrates containing a first and a second main surface, the method including: a first thinning of the edges of the first substrate over at least one portion of the circumference of the first substrate, at the first main surface of the first substrate; and placing the second main surface of the first substrate in contact with the second main surface of the second substrate such that a bonding wave propagates between the first and second substrates, securing the first and second substrates to one another by direct bonding such that portions of the second main surface of the first substrate located below the thinned portions of the first main surface of the first substrate are secured to the second substrate.


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