The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Jul. 05, 2016
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventors:
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 27/10 (2006.01); H01L 21/268 (2006.01); H01L 21/02 (2006.01); B23K 26/06 (2014.01); B23K 103/00 (2006.01); B23K 103/16 (2006.01); G02B 19/00 (2006.01); G02B 27/09 (2006.01); H01L 21/324 (2006.01); H01L 27/12 (2006.01); H01S 3/23 (2006.01); G02B 27/48 (2006.01); H01S 3/00 (2006.01); H01S 3/225 (2006.01);
U.S. Cl.
CPC ...
G02B 27/1086 (2013.01); B23K 26/0608 (2013.01); B23K 26/0643 (2013.01); B23K 26/0652 (2013.01); G02B 19/0047 (2013.01); G02B 27/0905 (2013.01); G02B 27/0944 (2013.01); G02B 27/0961 (2013.01); G02B 27/0977 (2013.01); G02B 27/48 (2013.01); H01L 21/02422 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/02686 (2013.01); H01L 21/268 (2013.01); H01L 21/324 (2013.01); H01L 27/1285 (2013.01); H01S 3/23 (2013.01); B23K 2103/172 (2018.08); B23K 2103/56 (2018.08); H01S 3/005 (2013.01); H01S 3/225 (2013.01); H01S 3/2383 (2013.01);
Abstract
A laser exposure system may include a plurality of laser devices configured to output laser beams with which an irradiated subject is irradiated, and at least one beam property adjustment unit disposed on optical paths of the laser beams outputted from the plurality of laser devices, and configured to allow beam properties of the laser beams to be approximately a same as each other.