The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Mar. 08, 2016
Applicant:
Teknologian Tutkimuskeskus Vtt Oy, Espoo, FI;
Inventors:
Assignee:
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/26 (2006.01); G01J 3/45 (2006.01); G02B 5/08 (2006.01); G01B 9/02 (2006.01); G01J 1/04 (2006.01); H01L 21/02 (2006.01); H01L 21/20 (2006.01); G02B 26/08 (2006.01); G01J 3/02 (2006.01); B81B 7/00 (2006.01); G02B 5/28 (2006.01); G01J 3/28 (2006.01);
U.S. Cl.
CPC ...
G01J 3/26 (2013.01); G01B 9/02 (2013.01); G01B 9/02018 (2013.01); G01J 1/0414 (2013.01); G01J 3/0278 (2013.01); G01J 3/45 (2013.01); G02B 5/08 (2013.01); G02B 5/0816 (2013.01); G02B 26/0841 (2013.01); H01L 21/02019 (2013.01); H01L 21/2003 (2013.01); B81B 7/00 (2013.01); G01B 2290/25 (2013.01); G01J 2003/2879 (2013.01); G02B 5/28 (2013.01);
Abstract
A method for producing a mirror plate for a Fabry-Perot interferometer includes