The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Oct. 30, 2014
Applicant:
Showa Denko K.k., Tokyo, JP;
Inventors:
Assignee:
SHOWA DENKO K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); C30B 25/12 (2006.01); C30B 25/16 (2006.01); C30B 25/20 (2006.01); C30B 29/36 (2006.01); H01L 21/687 (2006.01); H01L 21/02 (2006.01); C23C 16/32 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C30B 25/14 (2006.01); C30B 31/14 (2006.01);
U.S. Cl.
CPC ...
C30B 25/12 (2013.01); C23C 16/325 (2013.01); C23C 16/4584 (2013.01); C23C 16/45508 (2013.01); C30B 25/14 (2013.01); C30B 25/165 (2013.01); C30B 25/20 (2013.01); C30B 29/36 (2013.01); H01L 21/0262 (2013.01); H01L 21/02378 (2013.01); H01L 21/02529 (2013.01); H01L 21/68735 (2013.01); H01L 21/68764 (2013.01); H01L 21/68771 (2013.01); C30B 31/14 (2013.01);
Abstract
The SiC epitaxial wafer-producing apparatus according to the invention includes a mounting plate having a concave accommodation portion, a satellite that is provided in the concave accommodation portion and has an upper surface on which a SiC substrate is placed, and a carbon member that is provided in the concave accommodation portion at a position which is lower than the SiC substrate and does not come into contact with the SiC substrate.