The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2019
Filed:
May. 17, 2018
Fairchild Semiconductor Corporation, Phoenix, AZ (US);
Salman Akram, Boise, ID (US);
Venkat Ananthan, Cupertino, CA (US);
Fairchild Semiconductor Corporation, Phoenix, AZ (US);
Abstract
In a general aspect, a power semiconductor device can include a silicon carbide (SiC) substrate and a SiC epitaxial layer disposed on the SiC substrate. The device can include a well region disposed in the epitaxial layer, a source region disposed in the well region and a gate trench disposed in the epitaxial layer and adjacent to the source region. The gate trench can have a depth that is greater than a depth of the well region and less than a depth of the epitaxial layer. The device can include a hybrid gate dielectric disposed on a sidewall of the gate trench and a bottom surface of the gate trench. The hybrid gate dielectric can include a first high-k material and a second high-k dielectric material that is different than the first high-k dielectric material. The device can include a conductive gate electrode disposed on the hybrid gate dielectric.