The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2019

Filed:

Mar. 05, 2018
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Inventors:

Koichiro Tanaka, Kanagawa, JP;

Tomoaki Moriwaka, Kanagawa, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/09 (2006.01); H01S 3/00 (2006.01); H01L 21/268 (2006.01); B23K 26/064 (2014.01); B23K 26/06 (2014.01); H01L 21/02 (2006.01); B23K 26/073 (2006.01); H01L 33/08 (2010.01); H01L 21/28 (2006.01); H01L 21/20 (2006.01); H01L 27/32 (2006.01); H01L 51/52 (2006.01); H01S 5/40 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
G02B 27/0955 (2013.01); B23K 26/06 (2013.01); B23K 26/064 (2015.10); B23K 26/0604 (2013.01); B23K 26/0732 (2013.01); B23K 26/0736 (2013.01); B23K 26/0738 (2013.01); G02B 27/09 (2013.01); G02B 27/095 (2013.01); H01L 21/02422 (2013.01); H01L 21/02532 (2013.01); H01L 21/02678 (2013.01); H01L 21/02683 (2013.01); H01L 21/02686 (2013.01); H01L 21/268 (2013.01); H01L 21/28017 (2013.01); H01L 33/08 (2013.01); H01S 3/005 (2013.01); H01L 21/2026 (2013.01); H01L 27/1285 (2013.01); H01L 27/3244 (2013.01); H01L 27/3295 (2013.01); H01L 51/5237 (2013.01); H01L 51/5246 (2013.01); H01S 5/4012 (2013.01); H01S 5/4025 (2013.01);
Abstract

If an optical path length of an optical system is reduced and a length of a laser light on an irradiation surface is increased, there occurs curvature of field which is a phenomenon that a convergent position deviates depending on an incident angle or incident position of a laser light with respect to a lens. To avoid this phenomenon, an optical element having a negative power such as a concave lens or a concave cylindrical lens is inserted to regulate the optical path length of the laser light and a convergent position is made coincident with a irradiation surface to form an image on the irradiation surface.


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