The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2019
Filed:
Oct. 09, 2017
Nxp Usa, Inc., Austin, TX (US);
Jerome Romain Enjalbert, Tournefeuille, FR;
NXP USA, Inc., Austin, TX (US);
Abstract
A method for testing a multi-axis micro-electro-mechanical system(MEMS) acceleration sensor includes applying a first voltage to a first-axis excitation plate to move a first proof mass in contact with a proof mass stop. A second voltage is applied to a second-axis excitation plate while maintaining the first voltage to the first-axis excitation plate, to move the first proof mass in a direction orthogonal to the first-axis while in contact with the proof mass stop A reference voltage is applied to the first-axis excitation plate and a determination is made whether an output voltage of the MEMS device is higher than a threshold voltage. If the output voltage is higher than the threshold voltage ten stiction is detected and stiction recovery may therefore be preformed.