The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2019

Filed:

Jun. 15, 2017
Applicant:

Corning Incorporated, Corning, NY (US);

Inventors:

Thomas James Dunn, Penfield, NY (US);

Paul Francis Michaloski, Rochester, NY (US);

Assignee:

Corning Incorporated, Corning, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/30 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02078 (2013.01); G01B 9/02043 (2013.01); G01B 11/306 (2013.01); G01B 2290/50 (2013.01);
Abstract

A metrology apparatus has an illumination source that directs collimated light to a reference surface and to an optical component having a test surface that is in parallel with the reference surface. A first imaging lens defines a Fourier transform plane for light reflected from the reference surface and the test surface. A spatial filtering element is actuable to a blocking position that blocks specular light at the transform plane. A second imaging lens forms, at an image plane, an image of the test surface. A sensor array generates image data from received light at the image plane.


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