The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Sep. 07, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Karthik Janakiraman, San Jose, CA (US);
Hari K. Ponnekanti, San Jose, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); B65G 54/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67709 (2013.01); B65G 54/02 (2013.01); H01L 21/6776 (2013.01); H01L 21/67173 (2013.01); H01L 21/67178 (2013.01); B65G 2201/0261 (2013.01);
Abstract
A substrate transport system is disclosed and includes a chamber having an interior wall, a planar motor disposed on the interior wall, and a substrate carrier magnetically coupled to the planar motor. The substrate carrier comprises a base and a substrate supporting surface coupled to a support member extending from the base in a cantilevered orientation.