The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2019

Filed:

Feb. 27, 2018
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventor:

Josef Biberger, Wildenberg, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/22 (2006.01); H01J 37/153 (2006.01); G01N 23/2252 (2018.01); G01N 23/2254 (2018.01); G01N 1/06 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); G01N 1/06 (2013.01); G01N 23/2252 (2013.01); G01N 23/2254 (2013.01); H01J 37/153 (2013.01); H01J 37/222 (2013.01); H01J 37/224 (2013.01); G01N 2223/418 (2013.01); H01J 2237/024 (2013.01); H01J 2237/151 (2013.01); H01J 2237/152 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/221 (2013.01); H01J 2237/226 (2013.01); H01J 2237/2801 (2013.01);
Abstract

The system described herein relates to an object preparation device for preparing an object in a particle beam apparatus. By way of example, the particle beam apparatus is an electron beam apparatus and/or an ion beam apparatus. The system described herein moreover relates to a particle beam apparatus having such an object preparation device and to a method for operating the particle beam apparatus. The object preparation device may have an object receptacle device for receiving the object, a cutting device and a cutting bevel for cutting the object, wherein the cutting bevel may be arranged at the cutting device. The cutting bevel may lay in a cutting plane. Further, an axis of rotation may lay in the cutting plane. The cutting bevel may be embodied to be rotatable about the axis of rotation.


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