The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
Dec. 15, 2016
Asml Netherlands B.v., Veldhoven, NL;
Johan Frederik Dijksman, Weert, NL;
Bastiaan Lambertus Wilhelmus Marinus van de Ven, Rosmalen, NL;
Koen Gerhardus Winkels, 's Hertogenbosch, NL;
Theodorus Wilhelmus Driessen, San Diego, CA (US);
Georgiy O. Vaschenko, San Diego, CA (US);
Peter Michael Baumgart, Pleasanton, CA (US);
Wilhelmus Henricus Theodorus Maria Aangenent, Eindhoven, NL;
Jan Okke Nieuwenkamp, Enschede, NL;
Wim Ronald Kampinga, Deventer, NL;
Jari Ruotsalainen, San Diego, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Droplet generators, such as used in an EUV radiation source, and associated EUV radiation sources and lithographic apparatuses. A droplet generator can include a nozzle assembly to emit the fuel as droplets, the nozzle assembly being within a pressurized environment at substantially the same pressure as the fuel pressure within the droplet generator. A droplet generator can include an actuator in contact with and biased against a pump chamber by means of a biasing mechanism having an actuator support biased against the actuator. The actuator acts on the fuel within the pump chamber to create droplets. The actuator support has a material with a greater coefficient of thermal expansion than its surrounding structure, such that it is moveable within the surrounding structure at ambient temperature, but expands against the surrounding structure at an operating temperature, so as to clamp the actuator support against the surrounding structure at the operating temperature.