The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2019

Filed:

Apr. 08, 2019
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventor:

Motoki Niwano, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/03 (2006.01); H05G 2/00 (2006.01); H01S 3/10 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02F 1/0305 (2013.01); H01S 3/10 (2013.01); H05G 2/005 (2013.01); H05G 2/006 (2013.01); H05G 2/008 (2013.01); G03F 7/70033 (2013.01);
Abstract

A laser device includes: a plurality of optical shutters (); a power source device () configured to generate high voltage to be applied to the optical shutters (); a high-voltage side wire () connecting the power source device () and each of the optical shutters (); a ground-side wire () grounding each of the optical shutters (); and a high-voltage side shared wire () and a ground-side shared wire () connecting the optical shutters () in parallel. One of the high-voltage side wire () and the ground-side wire () is connected with the optical shutter () disposed on the most upstream side in the traveling direction of the laser beam, and the other of the high-voltage side wire () and the ground-side wire () is connected with the optical shutter () disposed on the most downstream side in the traveling direction of the laser beam.


Find Patent Forward Citations

Niwano, Motoki. (2019). Laser device and extreme ultraviolet light generation device (U.S. Patent No. 10481422). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10481422

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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