The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2019
Filed:
May. 04, 2017
Versum Materials Us, Llc, Allentown, PA (US);
Charles Michael Birtcher, Valley Center, CA (US);
James Patrick Nehlsen, East Stroudsburg, PA (US);
Sergei Vladimirovich Ivanov, Schnecksville, PA (US);
Thomas Andrew Steidl, Escondido, CA (US);
Kai Kang, Allentown, PA (US);
Wade Hampton Bailey, III, Emmaus, PA (US);
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Abstract
Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.