The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Oct. 13, 2017
Applicant:

Stmicroelectronics Pte Ltd, Singapore, SG;

Inventors:

Olivier Le Neel, Singapore, SG;

Ravi Shankar, Singapore, SG;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/14 (2006.01); G01N 27/74 (2006.01); H01L 21/8234 (2006.01); H01L 43/04 (2006.01); H01L 43/06 (2006.01); H01L 43/10 (2006.01);
U.S. Cl.
CPC ...
H01L 43/14 (2013.01); G01N 27/74 (2013.01); H01L 21/8234 (2013.01); H01L 43/04 (2013.01); H01L 43/065 (2013.01); H01L 43/10 (2013.01); Y10T 29/4913 (2015.01);
Abstract

A miniature oxygen sensor makes use of paramagnetic properties of oxygen gas to provide a fast response time, low power consumption, improved accuracy and sensitivity, and superior durability. The miniature oxygen sensor disclosed maintains a sample of ambient air within a micro-channel formed in a semiconductor substrate. Omolecules segregate in response to an applied magnetic field, thereby establishing a measureable Hall voltage. Oxygen present in the sample of ambient air can be deduced from a change in Hall voltage with variation in the applied magnetic field. The magnetic field can be applied either by an external magnet or by a thin film magnet integrated into a gas sensing cavity within the micro-channel. A differential sensor further includes a reference element containing an unmagnetized control sample. The miniature oxygen sensor is suitable for use as a real-time air quality monitor in consumer products such as smart phones.


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