The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2019

Filed:

Aug. 06, 2018
Applicants:

Kyushu University, National University Corporation, Fukuoka, JP;

Gigaphoton Inc., Tochigi, JP;

Inventors:

Hiroshi Ikenoue, Fukuoka, JP;

Akira Suwa, Oyama, JP;

Osamu Wakabayashi, Oyama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/228 (2006.01); H01L 21/268 (2006.01); B23K 26/00 (2014.01); B23K 26/06 (2014.01); B23K 26/067 (2006.01); B23K 26/073 (2006.01); B23K 26/08 (2014.01); B23K 26/354 (2014.01); B23K 26/0622 (2014.01); B23K 26/066 (2014.01); B23K 26/12 (2014.01); B23K 103/00 (2006.01); B23K 101/34 (2006.01); B23K 101/40 (2006.01); B23K 103/16 (2006.01); B23K 103/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/228 (2013.01); B23K 26/0006 (2013.01); B23K 26/0604 (2013.01); B23K 26/066 (2015.10); B23K 26/0622 (2015.10); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/0676 (2013.01); B23K 26/0732 (2013.01); B23K 26/0861 (2013.01); B23K 26/1224 (2015.10); B23K 26/354 (2015.10); H01L 21/268 (2013.01); B23K 2101/34 (2018.08); B23K 2101/40 (2018.08); B23K 2103/172 (2018.08); B23K 2103/18 (2018.08); B23K 2103/54 (2018.08);
Abstract

A laser doping device includes: a solution supply system configured to supply a solution containing dopant to a doping region; a pulse laser system configured to output pulse laser light including a plurality of pulses, the pulse laser light transmitting through the solution; a first control unit configured to control a number of pulses of the pulse laser light for allowing the doping region to be irradiated, and to control a fluence of the pulse laser light in the doping region; and a second control unit configured to control a flow velocity of the solution so as to move bubbles, from the doping region, occurring in the solution every time of irradiation with the pulse.


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