The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2019
Filed:
Oct. 05, 2017
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/16 (2006.01); G03F 7/32 (2006.01); G03F 7/38 (2006.01); G03F 7/20 (2006.01); C08F 220/30 (2006.01); C08F 212/14 (2006.01); C08F 220/28 (2006.01); G03F 7/039 (2006.01); C07C 51/41 (2006.01); H01L 21/027 (2006.01); C07C 51/00 (2006.01); C08F 12/24 (2006.01); C09D 125/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 51/00 (2013.01); C07C 51/41 (2013.01); C08F 12/24 (2013.01); C08F 212/14 (2013.01); C08F 220/28 (2013.01); C08F 220/30 (2013.01); C09D 125/18 (2013.01); G03F 7/0046 (2013.01); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01); G03F 7/0395 (2013.01); G03F 7/0397 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2004 (2013.01); G03F 7/2006 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01); H01L 21/0274 (2013.01); C08F 2220/283 (2013.01); C08F 2220/301 (2013.01); C08F 2800/20 (2013.01);
Abstract
A resist composition comprising a base polymer and a metal salt of carboxylic acid or sulfonamide is provided, the metal being selected from calcium, strontium, barium, cerium, aluminum, indium, gallium, thallium scandium, and yttrium. The resist composition exhibits a sensitizing effect and an acid diffusion suppressing effect and forms a pattern having improved resolution, LWR and CDU.