The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2019
Filed:
Dec. 21, 2015
Applicant:
Component Re-engineering Company, Inc., Santa Clara, CA (US);
Inventors:
Brent Elliot, Cupertino, CA (US);
Alfred Grant Elliott, Palo Alto, CA (US);
Assignee:
Component Re-Engineering Company, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/581 (2006.01); C04B 37/00 (2006.01); B23K 1/00 (2006.01); B23K 1/19 (2006.01); B23K 35/28 (2006.01); B23K 35/30 (2006.01); B23K 35/36 (2006.01);
U.S. Cl.
CPC ...
B23K 1/0016 (2013.01); B23K 1/19 (2013.01); B23K 35/286 (2013.01); B23K 35/302 (2013.01); B23K 35/36 (2013.01); C04B 35/581 (2013.01); C04B 37/003 (2013.01); C04B 37/006 (2013.01); C04B 2237/16 (2013.01); C04B 2237/366 (2013.01);
Abstract
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The ceramic pieces may be aluminum nitride or other ceramics, and the pieces may be brazed with a high purity silicon or a silicon alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the interior of a heater or electrostatic chuck.