The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Mar. 22, 2016
Applicant:
Techinsights Inc., Ottawa, Ontario, CA;
Inventors:
Assignee:
TECHINSIGHTS INC., Ottawa, Ontario, CA;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/304 (2006.01); H01J 37/26 (2006.01); H01J 37/22 (2006.01); H04N 5/357 (2011.01); G01N 23/2251 (2018.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H04N 5/357 (2013.01); G01N 23/2251 (2013.01); H01J 37/222 (2013.01); H01J 37/26 (2013.01); H01J 37/28 (2013.01); H01J 37/3045 (2013.01); G01N 2223/418 (2013.01);
Abstract
Devices, systems and methods relating to a distortion-correcting imaging for collecting image-related data of a substrate are disclosed, comprising: a beam emitter for directing an emission at an intended location on the substrate, and a signal detector for determining a signal intensity value associated with the emission; wherein the signal intensity value is associated with a corrected substrate location, said corrected substrate location determined from the intended substrate location and a correction factor, said correction factor being a function of said intended substrate location.