The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
Jun. 13, 2018
Carl Zeiss Microscopy Gmbh, Jena, DE;
Rainer Arnold, Thalfingen, DE;
Marcin Janaszewski, Pabianice, PL;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A particle microscope includes a particle beam system directing a particle beam onto a sample. The particle beam system includes a magnetic lens energized by an adjustable lens current. The sample is positioned at an adjustable distance from the lens, and particles of the beam have an adjustable kinetic energy. A method of operating such microscope includes positioning a sample at a distance from the lens, adjusting the kinetic energy, changing the lens current at plural different lens current change rates, determining a lens current at focus for each of the plural different lens current change rates, and determining an optimized lens current based on the determined lens currents at focus and the lens current change rates.