The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2019
Filed:
May. 15, 2017
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventors:
Hirotaka Miyamoto, Oyama, JP;
Osamu Wakabayashi, Oyama, JP;
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); G02B 6/12 (2006.01); B44C 1/22 (2006.01); F21V 8/00 (2006.01); H01S 3/1055 (2006.01); H01S 3/225 (2006.01); G02B 6/00 (2006.01); G02B 26/08 (2006.01); H01S 3/08 (2006.01);
U.S. Cl.
CPC ...
G02B 6/12011 (2013.01); G02B 5/18 (2013.01); G02B 5/1838 (2013.01); G02B 6/00 (2013.01); G02B 6/0016 (2013.01); H01S 3/1055 (2013.01); H01S 3/225 (2013.01); G02B 5/1847 (2013.01); G02B 5/1861 (2013.01); G02B 6/12 (2013.01); G02B 26/0808 (2013.01); G02B 26/0883 (2013.01); G02B 2006/12197 (2013.01); H01S 3/08004 (2013.01);
Abstract
A grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region may include: a grating substrate; a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof; and a first protective film formed by an ALD method above the first aluminum metal film.