The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2019

Filed:

Feb. 06, 2014
Applicant:

Nikon Metrology NV, Heverlee, BE;

Inventors:

Daniel Hilton, Aylesbury, GB;

Diego Alfredo Punin Albarracin, Berkhamsted, GB;

Assignee:

Nikon Metrology NV, Heverlee, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 18/00 (2006.01); A61B 6/08 (2006.01); A61B 6/00 (2006.01); G01B 15/02 (2006.01); G01N 23/046 (2018.01); A61B 6/03 (2006.01);
U.S. Cl.
CPC ...
A61B 6/583 (2013.01); A61B 6/032 (2013.01); G01B 15/02 (2013.01); G01N 23/046 (2013.01);
Abstract

The invention provides a kit for assembly of an artifact for evaluating performance purposes of an X-ray CT metrology system. The artifact comprises one or more interconnectable, stackable support plates, onto which a plurality of spherical bodies is mounted. The lightweight stacked support plate structure allows for a plurality of different configurations, and can be disassembled for enhanced storage, and safe and compact transportation.


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