The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2019

Filed:

Sep. 26, 2018
Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventor:

Yongfeng Ni, Waalre, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/067 (2006.01); G02F 1/365 (2006.01); H01S 3/094 (2006.01); H01S 3/10 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); G02F 1/35 (2006.01);
U.S. Cl.
CPC ...
H01S 3/06741 (2013.01); G02F 1/365 (2013.01); G03F 7/70616 (2013.01); G03F 9/7065 (2013.01); H01S 3/06754 (2013.01); H01S 3/094003 (2013.01); H01S 3/10007 (2013.01); G02F 2001/3528 (2013.01); G02F 2202/32 (2013.01);
Abstract

A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.


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