The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Nov. 19, 2012
Applicant:
Alchimer, Massy, FR;
Inventor:
Frederic Raynal, Paris, FR;
Assignee:
ALCHIMER, Massy, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/00 (2006.01); H01L 21/288 (2006.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 21/67 (2006.01); C25D 5/02 (2006.01); C25D 17/06 (2006.01); C23C 18/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/2885 (2013.01); C23C 18/1632 (2013.01); C23C 18/1653 (2013.01); C25D 5/02 (2013.01); C25D 17/001 (2013.01); C25D 17/06 (2013.01); H01L 21/6723 (2013.01); H01L 21/76898 (2013.01); H01L 23/481 (2013.01); H01L 2924/0002 (2013.01);
Abstract
The invention relates to a machine () adapted to metallize a cavity of a semi-conductive or conductive substrate such as a structure of the through silicon via type, according to a metallization process comprising the steps consisting of: