The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Feb. 12, 2014
Freiberger Compound Materials Gmbh, Freiberg, DE;
Wolfram Fliegel, Dresden, DE;
Christoph Klement, Chemnitz, DE;
Christa Willnauer, Dorfhain, DE;
Max Scheffer-Czygan, Chemnitz, DE;
André Kleinwechter, Freiberg, DE;
Stefan Eichler, Dresden, DE;
Berndt Weinert, Freiberg, DE;
Michael Mäder, Coswig, DE;
FREIBERGER COMPOUND MATERIALS GMBH, Freiberg, DE;
Abstract
The present invention relates to a novel process for producing a surface-treated gallium arsenide substrate as well as novel provided gallium arsenide substrates as such as well as the use thereof. The improvement of the process according to the invention is based on a particular final surface treatment with an oxidation treatment of at least one surface of the gallium arsenide substrate in dry condition by means of UV radiation and/or ozone gas, a contacting of the at least one surface of the gallium arsenide substrate with at least one liquid medium and a Marangoni drying of the gallium arsenide substrate. The gallium arsenide substrates provided according to the invention exhibit a so far not obtained surface quality, in particular a homogeneity of surface properties, which is detectable by means of optical surface analyzers, specifically by means of ellipsometric lateral substrate mapping for the optical contact-free quantitative characterization.