The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2019

Filed:

Aug. 25, 2017
Applicant:

Ubotic Company Limited, Hong Kong, CN;

Inventor:

Ming-Wa Tam, Hong Kong, CN;

Assignee:

UBOTIC COMPANY LIMITED, Hong Kong, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/684 (2006.01); B81B 7/00 (2006.01); H01L 23/00 (2006.01); G01F 15/00 (2006.01); G01F 1/688 (2006.01);
U.S. Cl.
CPC ...
G01F 1/684 (2013.01); B81B 7/0032 (2013.01); G01F 1/6845 (2013.01); G01F 15/00 (2013.01); H01L 24/91 (2013.01); H01L 24/97 (2013.01); H01L 24/98 (2013.01); G01F 1/6888 (2013.01);
Abstract

A mass flow sensor module and method of manufacture thereof are provided, wherein a semiconductor sensor die is integrated within an enhanced molded housing structure that maintains an air tight seal and protects the die from abrasive wear, and which also provides laminar flow of the liquid gas to be sensed. Since the die is embedded in the substrate; there is no need for a spacer for reducing die thickness induced flow turbulence. Moreover, the die surface is at the same level as the top surface of the substrate, such that there is no performance impact due to die thickness variation and therefore no die attach bond line thickness control requirement. In one embodiment, a thermal enhancement capability is provided.


Find Patent Forward Citations

Tam, Ming-Wa. (2019). Mass flow sensor module and method of manufacture (U.S. Patent No. 10458826). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10458826

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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