The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2019
Filed:
Nov. 05, 2012
Applicant:
Toshiba Mitsubishi-electric Industrial Systems Corporation, Chuo-ku, JP;
Inventors:
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
B05B 7/00 (2006.01); B05B 7/04 (2006.01); C23C 16/448 (2006.01); B05B 14/00 (2018.01); B05B 12/18 (2018.01); B05B 15/55 (2018.01); B05B 7/08 (2006.01); C23C 16/455 (2006.01); C23C 16/44 (2006.01); C23C 16/46 (2006.01); B05B 1/04 (2006.01);
U.S. Cl.
CPC ...
C23C 16/455 (2013.01); B05B 7/0012 (2013.01); B05B 7/0483 (2013.01); B05B 12/18 (2018.02); B05B 14/00 (2018.02); B05B 15/55 (2018.02); C23C 16/4412 (2013.01); C23C 16/4486 (2013.01); C23C 16/46 (2013.01); B05B 1/044 (2013.01); B05B 7/0075 (2013.01); B05B 7/0807 (2013.01); B05B 7/0861 (2013.01);
Abstract
A film forming apparatus includes a spray nozzle, a first chamber, a first gas supply port, a second chamber, a through hole, and a mist outlet. A solution transformed into droplets that is to be sprayed from the spray nozzle is housed in the first chamber and transformed into a mist in the first chamber by gas injected from the first gas supply port. The solution in mist form moves from the first chamber through the through hole to the second chamber and is misted onto a substrate from the mist outlet of the second chamber.