The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2019

Filed:

Jul. 28, 2014
Applicant:

Orbotech Ltd., Yavne, IL;

Inventors:

Ofer Saphier, Rehovot, IL;

Doron Malka, Tel Aviv, IL;

David Fisch, Paduelle, IL;

Assignee:

Orbotech Ltd., Yavne, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04N 5/232 (2006.01); G01S 17/08 (2006.01); G01S 17/48 (2006.01); G01S 7/481 (2006.01); G01S 7/484 (2006.01); G01S 7/486 (2006.01); G02B 7/32 (2006.01); G02B 7/10 (2006.01);
U.S. Cl.
CPC ...
H04N 5/23212 (2013.01); G01S 7/481 (2013.01); G01S 7/484 (2013.01); G01S 7/486 (2013.01); G01S 17/08 (2013.01); G01S 17/48 (2013.01); G02B 7/102 (2013.01); G02B 7/32 (2013.01); G01S 7/4815 (2013.01);
Abstract

A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information.


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