The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2019

Filed:

Sep. 03, 2017
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventor:

Toshifumi Nishiguchi, Hakusan Ishikawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/40 (2006.01); H01L 29/78 (2006.01); H01L 21/28 (2006.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/407 (2013.01); H01L 21/28008 (2013.01); H01L 29/0878 (2013.01); H01L 29/42368 (2013.01); H01L 29/42376 (2013.01); H01L 29/66734 (2013.01); H01L 29/7813 (2013.01);
Abstract

A semiconductor device includes a first electrode, a first semiconductor layer on the first electrode, a second semiconductor layer on the first semiconductor layer, a third semiconductor layer on the second semiconductor layer, a second electrode in electrical contact with the third semiconductor layer, a gate electrode, a first insulating film between the side surface of the third semiconductor layer and the gate electrode, a field plate electrode, and a second insulating film. The field plate has an upper portion adjacent to the gate electrode and a lower portion having a width less than a width of the upper portion. The second insulating film has a first portion between the field plate electrode's upper portion and the first semiconductor layer and a second portion between the field plate electrode's lower portion and the first semiconductor layer, the second portion having a width greater than the width of the first portion.


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