The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2019

Filed:

Jul. 23, 2018
Applicants:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Semiconductor Manufacturing International (Beijing) Corporation, Beijing, CN;

Inventor:

Poren Tang, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 21/324 (2006.01); H01L 29/10 (2006.01); H01L 21/8238 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0847 (2013.01); H01L 21/324 (2013.01); H01L 21/823821 (2013.01); H01L 21/823864 (2013.01); H01L 29/1054 (2013.01); H01L 29/6656 (2013.01); H01L 29/785 (2013.01); H01L 29/7848 (2013.01); H01L 21/823814 (2013.01);
Abstract

Semiconductor structures and fabrication methods are provided. An exemplary fabrication method includes providing a base substrate; forming a gate structure on a top surface of the base substrate; and forming a first doped source/drain layer at both sides of the gate structure. A minimum distance between a sidewall surface of the first doped source/drain doping layer and an adjacent sidewall surface of the gate structure is a first distance. The method also includes forming a second doped source/drain layer on the first doped source/drain layer at both sides of the gate structure. A minimum distance between a sidewall surface of the second doped source/drain doping layer and an adjacent sidewall surface of the gate structure is a second distance; and the second distance is greater than the first distance.


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