The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Jan. 16, 2016
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Thomas H. Baum, New Fairfield, CT (US);
John P. Coates, Newtown, CT (US);
Robert L. Wright, Jr., Newtown, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/03 (2006.01); G01N 21/31 (2006.01);
U.S. Cl.
CPC ...
G01N 21/031 (2013.01); G01N 21/31 (2013.01); G01N 2201/0636 (2013.01);
Abstract
A multipass cell assembly for monitoring of fluid is described, as well as fluid processing systems utilizing same, and associated methods of use of such multipass cell assembly for fluid monitoring. The multipass cell assembly is usefully employed in fluid processing operations such as monitoring of vapor deposition process reactants, e.g., reactants used for vapor deposition metallization of tungsten from a tungsten carbonyl precursor.