The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 22, 2019

Filed:

May. 15, 2018
Applicant:

Dmg Mori Co., Ltd., Yamato-Koriyama, Nara, JP;

Inventors:

Hideaki Tamiya, Isehara, JP;

Kazuki Noda, Isehara, JP;

Assignee:

DMG MORI CO., LTD., Yamato-Koriyama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G02B 27/42 (2006.01); G02B 27/28 (2006.01); G02B 27/14 (2006.01); G01B 9/021 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02041 (2013.01); G01B 9/021 (2013.01); G01B 9/02011 (2013.01); G01B 9/02018 (2013.01); G01B 9/02019 (2013.01); G01B 9/02027 (2013.01); G02B 27/14 (2013.01); G02B 27/283 (2013.01); G02B 27/4233 (2013.01); G02B 27/4277 (2013.01); G01B 2290/20 (2013.01); G01B 2290/70 (2013.01);
Abstract

A displacement detecting device includes a first diffraction grating, a light source, a displacement detecting unit, and a light receiving unit. The displacement detecting unit includes a light flux dividing unit, a second diffraction grating, and a reference reflecting member. An incident angle of a first light flux to the first diffraction grating, a diffraction angle of the first diffraction grating, an incident angle of the first light flux to the second diffraction grating, and a diffraction angle of the second diffraction grating are angles at which a displacement amount in an optical path length of the first light flux from the light flux dividing unit to the first diffraction grating and a displacement amount in an optical path length of the first light flux from the first diffraction grating to the second diffraction grating become equal in a case where a measured member is displaced in a direction orthogonal to a measured surface.


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