The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2019
Filed:
Nov. 26, 2014
Applicant:
Maruishi Sangyo Co., Ltd., Tokyo, JP;
Inventors:
Toshiyasu Yajima, Tokyo, JP;
Daisuke Ninomiya, Tokyo, JP;
Assignee:
MARUISHI SANGYO CO. LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/00 (2012.01); B24B 37/30 (2012.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B24B 37/30 (2013.01); H01L 21/68757 (2013.01); H01L 21/68771 (2013.01); H01L 21/68785 (2013.01);
Abstract
The present invention is a holding pad including a holding layer for holding a member to be polished, in which the holding layer includes on a part of a surface thereof a template fixing portion for sticking a template for preventing lateral displacement of the member to be polished, the template fixing portion has on a surface thereof an adsorption layer for adsorbing and fixing the template the template fixing portion, and the adsorption layer is formed of a composition which is formed by crosslinking a silicone composed of a predetermined siloxane.