The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Jan. 22, 2018
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Siva P. Adusumilli, Burlington, VT (US);
Anthony K. Stamper, Burlington, VT (US);
Laura J. Schutz, Richmond, VT (US);
Cameron E. Luce, Colchester, VT (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/49 (2006.01); H01L 29/51 (2006.01); H01L 29/78 (2006.01); H01L 27/12 (2006.01); H01L 21/84 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0653 (2013.01); H01L 21/76283 (2013.01); H01L 21/84 (2013.01); H01L 27/1207 (2013.01); H01L 29/7841 (2013.01); H01L 29/4991 (2013.01); H01L 29/515 (2013.01);
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to sealed cavity structures having a planar surface and methods of manufacture. The structure includes a cavity formed in a substrate material and which has a curvature at its upper end. The cavity is covered with epitaxial material that has an upper planar surface.