The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 2019

Filed:

Nov. 21, 2017
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventor:

Ting-Feng Liao, New Taipei, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11 (2006.01); H01L 27/11582 (2017.01); H01L 29/06 (2006.01); H01L 27/11556 (2017.01); H01L 23/528 (2006.01); H01L 23/532 (2006.01); H01L 29/10 (2006.01); H01L 21/768 (2006.01); H01L 21/762 (2006.01); H01L 27/11565 (2017.01); H01L 27/11519 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/76224 (2013.01); H01L 21/76816 (2013.01); H01L 21/76831 (2013.01); H01L 21/76843 (2013.01); H01L 21/76877 (2013.01); H01L 23/5283 (2013.01); H01L 23/53266 (2013.01); H01L 27/11556 (2013.01); H01L 29/0649 (2013.01); H01L 29/1037 (2013.01); H01L 27/11519 (2013.01); H01L 27/11565 (2013.01);
Abstract

A semiconductor structure includes a plurality of sub-array structures separated from each other by a plurality of isolation structures. The semiconductor structure further includes a three-dimensional array of memory cells. The memory cells include a plurality of cell groups disposed in the sub-array structures, respectively. The semiconductor structure further includes a plurality of conductive structures. Each of the conductive structures includes a plurality of conductive columns correspondingly disposed in each of the isolation structures along an extending direction of the isolation structures. The conductive columns penetrate through the each of the isolation structures. Each of the conductive columns has a circular cross section.


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