The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Jun. 28, 2013
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventor:
Yung-Tsun Liu, Taipei, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/12 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); B05D 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02282 (2013.01); B05D 1/005 (2013.01); H01L 21/02126 (2013.01); H01L 21/02137 (2013.01); H01L 21/6715 (2013.01);
Abstract
A device and method for dispensing liquid spin-on glass (SOG) onto semiconductor wafers. The method includes dispensing liquid SOG through a dispenser nozzle, detecting liquid SOG outside of the dispenser nozzle, indicating the presence of liquid SOG in an abnormal length relative to the dispenser nozzle and adjusting a suck back (SB) valve to withdraw liquid SOG from the abnormal length.
Liu, Yung-Tsun. (2019). System and method for dispensing liquid spin-on glass (sog) onto semiconductor wafers (U.S. Patent No. 10446390). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10446390
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile