The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
May. 23, 2019
Applicants:
Griffin A. P. Hovorka, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
Galen L Pfeiffer, Roca, NE (US);
Inventors:
Griffin A. P. Hovorka, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
Galen L Pfeiffer, Roca, NE (US);
Assignee:
J.A. WOOLLAM CO., INC., Lincoln, NE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/42 (2006.01); G01N 21/01 (2006.01); G01N 21/55 (2014.01); G01N 21/21 (2006.01); G01N 21/31 (2006.01);
U.S. Cl.
CPC ...
G01N 21/01 (2013.01); G01J 3/42 (2013.01); G01N 21/211 (2013.01); G01N 21/31 (2013.01); G01N 21/55 (2013.01);
Abstract
A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage. The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.