The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2019
Filed:
Mar. 29, 2017
Applicant:
Veeco Precision Surface Processing Llc, Horsham, PA (US);
Inventors:
John Taddei, Jim Thorpe, PA (US);
Laura Mauer, South Kent, CT (US);
George Chiaverini, Doylestown, PA (US);
Jia Li, Dunellen, NJ (US);
Assignee:
VEECO PRECISION SURFACE PROCESSING LLC, Horsham, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F28F 19/00 (2006.01); F28C 3/06 (2006.01);
U.S. Cl.
CPC ...
F28C 3/06 (2013.01);
Abstract
An apparatus and method for controlling fluid discharge temperature on a semiconductor manufacturing tool. In this technique, the temperature is controlled via the use of refrigerative exhaust. This embodiment includes the hardware and controls to perform and monitor the described operation.